Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus

ABSTRACT

A thin film deposition apparatus to remove static electricity generated between a substrate and a mask, and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of Korean Patent Application No.10-2009-0125029, filed on Dec. 15, 2009, in the Korean IntellectualProperty Office, the disclosure of which is incorporated herein, byreference.

BACKGROUND

1. Field

The present disclosure relates to a thin film deposition apparatus toremove static electricity generated between a substrate and a mask, anda method of manufacturing an organic light-emitting display device usingthe thin film deposition apparatus.

2. Description of the Related Art

Organic light-emitting display devices have a larger viewing angle,better contrast characteristics, and a faster response rate than otherdisplay devices and thus, have drawn attention as the next-generation ofdisplay device.

In general, organic light-emitting display devices have a stackedstructure including an anode, a cathode, and an emission layerinterposed between the anode and the cathode. Organic light-emittingdisplay devices display color images when holes and electrons, injectedrespectively from the anode and the cathode, recombine in the emissionlayer and emit light. However, it is difficult to achieve a highlight-emission efficiency with such a structure. Thus, intermediatelayers, including an electron injection layer, an electron transportlayer, a hole transport layer, a hole injection layer, etc., areadditionally interposed between the emission layer and each of theelectrodes.

The electrodes and the intermediate layers may be formed by usingvarious methods, one of which is a deposition method. When an organiclight-emitting display device is manufactured using the depositionmethod, a fine metal mask (FMM), having the same pattern as a thin filmto be formed, is disposed to closely contact a substrate, and a thinfilm material is deposited over the FMM, in order to form the thin filmhaving the desired pattern.

SUMMARY

The present disclosure provides a thin film deposition apparatus thatremoves static electricity generated between a substrate and a mask, sothat a phenomenon in which the mask and the substrate are not separated,due to the static electricity, does not occur, and a method ofmanufacturing an organic light-emitting display device by using the thinfilm deposition apparatus.

According to an aspect of the present disclosure, there is provided athin film deposition apparatus including: a holder to support asubstrate; a mask disposed to face a surface of the substrate; and astatic electricity remover to remove static electricity generatedbetween the substrate and the mask.

According to some aspects, the static electricity remover may remove thestatic electricity generated between the substrate and the mask, bysupplying a current to the mask.

According to some aspects, the static electricity remover may supply thecurrent to the mask at a predetermined frequency.

According to some aspects, the static electricity remover may include apower source to supply a current to the mask; a resistor to adjust theamount of the current; and a wire connected to the power source, theresistor, and the mask, so as to constitute a closed circuit.

According to another aspect of the present disclosure, there is provideda method of manufacturing an organic light-emitting device includingfirst and second electrodes formed on a substrate and facing each other,and an organic layer disposed between the first and second electrodes,the method including: disposing the substrate in a chamber; positioninga mask so as to face a surface of the substrate; depositing the organiclayer on the substrate through the mask; removing static electricitygenerated between the mask and the substrate; and separating the maskand the substrate from each other.

According to some aspects, the removing of the static electricity mayinclude supplying a current to the mask.

According to some aspects, the removing of the static electricity mayinclude supplying the current to the mask at a predetermined frequency.

According to some aspects, the removing of the static electricity mayinclude supplying the current to the mask, wherein the mask, a powersource to supply the current to the mask, and a resistor to adjustingthe amount of the current, constitute a closed circuit.

Additional aspects and/or advantages of the disclosure will be set forthin part in the description which follows and, in part, will be obviousfrom the description, or may be learned by practice of the presentdisclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

These and/or other aspects and advantages of the present disclosure willbecome apparent and more readily appreciated from the followingdescription of the exemplary embodiments, taken in conjunction with theaccompanying drawings, of which:

FIG. 1 is a schematic cross-sectional view of a thin film depositionapparatus, according to an exemplary embodiment of the presentdisclosure;

FIG. 2 is a schematic perspective view of a mask and a staticelectricity remover of FIG. 1, according to an exemplary embodiment ofthe present disclosure;

FIGS. 3 through 5 are cross-sectional views for illustrating a functionof the thin film deposition apparatus, according to an exemplaryembodiment of the present disclosure; and

FIG. 6 is a cross-sectional view of an organic light-emitting displaydevice manufactured using a thin film deposition device, according to anexemplary embodiment of the present disclosure.

DETAILED DESCRIPTION

Reference will now be made in detail to the exemplary embodiments of thepresent disclosure, examples of which are illustrated in theaccompanying drawings, wherein like reference numerals refer to the likeelements throughout. The exemplary embodiments are described below, inorder to explain the aspects of the present disclosure, by referring tothe figures.

FIG. 1 is a schematic cross-sectional view of a thin film depositionapparatus 100, according to an exemplary embodiment of the presentdisclosure. FIG. 2 is a schematic perspective view of a mask 103 and astatic electricity remover 120 of FIG. 1.

Referring to FIGS. 1 and 2, the thin film deposition apparatus 100 mayinclude a chamber 101, a holder 102, the mask 103, a deposition source104, and the static electricity remover 120. In the chamber 101, theholder 102, the mask 103, the deposition source 104, and the staticelectricity remover 120 may be placed, and a thin film depositionprocess may be performed. The chamber 101 may be maintained in a vacuumduring the thin film deposition process.

The holder 102 fixedly supports the substrate 110 in the chamber 101,during the thin film deposition process. As illustrated in FIG. 1, theholder 102 may support edge portions of the substrate 110, so that athin film 108 (see FIG. 3) may be deposited on a central portion of thesubstrate 110. The substrate 110 may be a substrate for a flat paneldisplay apparatus, or alternatively, may be a large-sized substrate,such as a mother glass on which a plurality of flat panel displayapparatuses may be formed.

The deposition source 104 may be disposed opposite to the substrate 110,in the chamber 101. The deposition source 104 may accommodate adeposition material (not shown) therein, and may heat the depositionmaterial. The heating vaporizes the deposition material, which is thendeposited on the substrate 110 as a thin film 108.

The mask 103 includes a plurality of openings (not shown), and isdisposed between the substrate 110 and the deposition source 104, so asto pattern the thin film 108 according to the openings. That is, thedeposition material vaporized by the deposition source 104 passesthrough the openings of the mask 103 and is deposited on a surface ofthe substrate 110, to form the thin film 108. The greater the distancebetween the substrate 110 and the mask 103, the more a shadow phenomenonoccurs. In order to prevent the shadow phenomenon, the substrate 110 andthe mask 103 may be attached as closely as possible. The openings of themask 103 may be a plurality of slits or dots (holes), but the presentdisclosure is not limited thereto.

The static electricity remover 120 may remove static electricity frombetween the substrate 110 and the mask 103. The mask 103 and thesubstrate 110 are aligned many times, in order to deposit the thin film108 in a desired position. In addition, in a case of an organiclight-emitting display device, since organic layers for emitting red,green, and blue light are formed on a substrate, various masks for therespective colors are used. An alignment operation is performed wheneverdifferent masks are used. The substrate 110 and the mask 103 may bealigned by adjusting an arrangement between the mask 103 and thesubstrate 110. In this case, the mask 103 and the substrate 110 may berepeatedly brought into and out of contact with each other. Thus, staticelectricity may be generated between the mask 103 and the substrate 110.The substrate 110 and the mask 103 may be adhered to each other, due tothe static electricity. Thus, a portion of the substrate 110 may bedamaged by the adhesion.

The above-described problem will now be described with reference toFIGS. 3 and 4. As shown in FIG. 3, static electricity may be generatedbetween the mask 103, the substrate 110, and a thin film 108, due to analignment operation between the mask 103 and the substrate 110, and thereplacement of various masks. Thus, the mask 103, the substrate 110, andthe thin film 108 contact each other, and the substrate 110 and the mask103 are closely attached. Then, as shown in FIG. 4, when the substrate110 is raised after a thin film deposition process is finished, aportion of the substrate 110 may not be properly separated from the mask103. Thus, the substrate 110 may be damaged, or a portion of the thinfilm 108 deposited on the substrate 110 may be separated from thesubstrate 110.

As shown in FIG. 5, the static electricity remover 120 connected to themask 103 may remove the static electricity generated between thesubstrate 110 and the mask 103, thereby preventing the substrate 110from being damaged when the substrate 110 and the mask 103 are separatedfrom each other. The static electricity remover 120 may include, forexample, a power source 105 to supply current to the mask 103, aresistor 106 to adjust the amount of the current, and a conductive wire107 constituting a closed circuit, connecting the power source 105, theresistor 106, and the mask 103. The current may be intermittentlysupplied to the mask 103, at a predetermined frequency. In other words,although not required in all aspects of the present invention, thecurrent is supplied to the mask for a predetermined amount of time at apredetermined frequency, and the current may be not supplied to the maskfor another predetermined amount of time.

As shown in FIG. 2, the static electricity remover 120 may be disposednext to the mask 103, since the deposition material emitted from thedeposition source 104 passes through upper and lower surfaces of themask 103, to be deposited on the substrate 110.

FIG. 6 is an organic light-emitting display device manufactured with athin film deposition apparatus, according to an exemplary embodiment ofthe present disclosure. In FIG. 6, a single sub-pixel of an activematrix (AM) type organic light-emitting display device is illustrated.Referring to FIG. 6, the single sub-pixel includes at least onethin-film transistor (TFT) and an electroluminescence (EL) device (e.g.,an organic light-emitting diode), which is a self-emissive device.However, the TFT is not limited to the structure of FIG. 6, as the TFTmay include various structures. The AM type organic light-emittingdisplay device will now be described in more detail.

As shown in FIG. 6, a buffer layer 330 is formed on a substrate 320, andthe TFT is formed on the buffer layer 330. The TFT includes asemiconductor active layer 331, a gate insulating layer 332 formed tocover the semiconductor active layer 331 and the buffer layer 330, and agate electrode 333 formed on the gate insulating layer 332. Aninterlayer insulating layer 334 is formed to cover the gate electrode333, and source and drain electrodes 335 are formed on the interlayerinsulating layer 334. The source and drain electrodes 335 contact sourceand drain regions of the semiconductor active layer 331, respectively,via contact holes formed through the gate insulating layer 332 and theinterlayer insulating layer 334. A first electrode layer 321 operatingas an anode of an OLED is connected to the source and drain electrodes335. The first electrode layer 321 is formed on a planarization layer337. A pixel defining layer 338 is formed to cover the first electrodelayer 321. An opening is formed in the pixel defining layer 338, and anorganic layer 326 of the OLED is formed in the opening. A secondelectrode layer 327 operating as a common electrode is formed to coverthe first electrode layer 321 and the opening.

The organic layer 326 of the OLED may include red (R), green (G), andblue (B) organic emissive layers, to thereby realize a full colordisplay. The R, G, and B organic emissive layers may be formed by thethin film deposition apparatus. The R, G, and B organic emissive layersmay be formed using respective masks. After the R, G, and B organicemissive layers are deposited, static electricity generated between asubstrate and a mask is removed by a static electricity remover of thethin film deposition apparatus, and then the substrate and the mask areseparated from each other.

The organic light-emitting display device is sealed, so as to preventexternal oxygen and moisture from penetrating into the organiclight-emitting display device. The organic light-emitting display deviceis for illustrative purposes only, and the structure of the organiclight-emitting display device may be variously changed.

According to various embodiments of the present disclosure, staticelectricity generated between a mask and a substrate may be removed,thereby preventing a phenomenon in which the mask and the substrate arenot separated, due to the static electricity.

Although a few exemplary embodiments of the present disclosure have beenshown and described, it would be appreciated by those skilled in the artthat changes may be made in these exemplary embodiments, withoutdeparting from the principles and spirit of the present disclosure, thescope of which is defined in the claims and their equivalents.

1. A thin film deposition apparatus comprising: a holder to support asubstrate; a mask disposed facing a surface of the substrate; and astatic electricity remover to remove static electricity generatedbetween the substrate and the mask.
 2. The thin film depositionapparatus of claim 1, wherein the static electricity remover removes thestatic electricity by supplying a current to the mask.
 3. The thin filmdeposition apparatus of claim 2, wherein the static electricity removersupplies the current to the mask at a predetermined frequency.
 4. Thethin film deposition apparatus of claim 1, wherein the staticelectricity remover comprises: a power source to supplying the currentto the mask; a resistor to adjust the amount of the current; and a wireconnected to the power source, the resistor, and the mask, to form aclosed circuit.
 5. A method of manufacturing an organic light-emittingdevice comprising first and second electrodes formed on a substrate,facing each other, and an organic layer disposed between the first andsecond electrodes, the method comprising: disposing the substrate in achamber; positioning a mask so as to face a surface of the substrate;depositing the organic layer on the substrate, through the mask;removing static electricity generated between the mask and thesubstrate; and separating the mask and the substrate.
 6. The method ofclaim 5, wherein the removing of the static electricity comprisessupplying a current to the mask.
 7. The method of claim 6, wherein thecurrent is supplied to the mask at a predetermined frequency.
 8. Themethod of claim 6, wherein the current is supplied to the mask, througha closed circuit formed between the mask, a power source to supply thecurrent to the mask, and a resistor to adjust an amount of the current.9. The thin film deposition apparatus of claim 2, wherein the staticelectricity remover supplies the current to the mask for a predeterminedamount of time.
 10. The method of claim 6, wherein the current issupplied to the mask for a predetermined amount of time.
 11. The methodof claim 6, wherein the supplying of the current to the mask comprisesalternately supplying the current to the mask for a first predeterminedtime and not supplying the current to the mask for a secondpredetermined amount of time.